grant

ECLIPSE-PFAS: Sustainable Use of Etch Gases in Semiconductor Manufacturing

Organization University of California-Los AngelesLocation LOS ANGELES, United StatesPosted 1 Jul 2025Deadline 30 Jun 2028
NSFUS FederalResearch GrantScience FoundationCA
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This award is made in response to Dear Colleague Letter 24-130, as part of the ECosystem for Leading Innovation in Plasma Science and Engineering (ECLIPSE) interdisciplinary program. This grant supports research that addresses the sustainable use of etch gases in semiconductor manufacturing, which is increasingly important for the US…

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ECLIPSE-PFAS: Sustainable Use of Etch Gases in Semiconductor Manufacturing — University of California-Los Angeles | Unit | Dev Procure