grant

Development of Real Time in-situ Plasma Process Monitoring

Organization UKRILocation United Kingdom
UKRIUK ResearchGrantActive
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Description preview

"This EngD project aims to develop a novel mass spectrometer tailored for identifying unwanted
polymers in plasma processing tools. A compact time-of-flight (TOF) analyser is being developed
to overcome the upper mass limitations of current commercial devices. The project's initial phase
involved developing a proprietary code for simulating…

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Development of Real Time in-situ Plasma Process Monitoring — UKRI | United Kingdom | Dev Procure