Monolithic Three-Dimensional Integrated Circuit Technology Based on High-Performance Junctionless Transistors Built on Single-Crystalline Silicon Nanomembranes

The information revolution is largely driven by semiconductor industry’s capability of incorporating electronic device components in microprocessor chips with increasingly higher density, as described by Moore’s law, during the past 70 years. However, it has become more and more difficult to sustain this progress by further reducing the size of…