grant

ECLIPSE-CHIPS: Closure Models for Low-Pressure, Low-Temperature Plasmas using Multi-Moment Fluid Modeling

Organization Stanford UniversityLocation STANFORD, United StatesPosted 1 Jul 2025Deadline 30 Jun 2028
NSFUS FederalResearch GrantScience FoundationCA
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This award is made in response to Dear Colleague Letter 24-130, as part of the ECosystem for Leading Innovation in Plasma Science and Engineering (ECLIPSE) interdisciplinary program. The award supports an effort to advance the predictive modeling capabilities of low-temperature plasmas (LTPs) for improved fabrication of microelectronics systems.…

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ECLIPSE-CHIPS: Closure Models for Low-Pressure, Low-Temperature Plasmas using Multi-Moment Fluid Modeling — Stanford Uni | Dev Procure