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Collaborative Research: ECLIPSE-CHIPS: Avoiding Contamination by Controlling Charging and Transport of Particles in Plasmas under Modulation and Afterglow Conditions

Organization University of IowaLocation IOWA CITY, United StatesPosted 1 Jul 2025Deadline 30 Jun 2028
NSFUS FederalResearch GrantScience FoundationIA
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This award is made in response to Dear Colleague Letter 24-130, as part of the ECosystem for Leading Innovation in Plasma Science and Engineering (ECLIPSE) interdisciplinary program. In semiconductor manufacturing, small solid particles, such as dust particles, are a source of contamination. Microchips made from silicon wafers are ruined when a…

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Collaborative Research: ECLIPSE-CHIPS: Avoiding Contamination by Controlling Charging and Transport of Particles in Plas | Dev Procure