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CAREER: Synergistic Co-Design of Hardware and Control Systems for Over-Actuated Motion Stages in High-Throughput Chip Manufacturing

Organization University of Wisconsin-MadisonLocation MADISON, United StatesPosted 1 Jul 2025Deadline 30 Jun 2030
NSFUS FederalResearch GrantScience FoundationWI
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This Faculty Early Career Development Program (CAREER) grant will fund research that strives to address an acceleration-bandwidth trade-off in precision motion systems to enable future integrated circuit manufacturing equipment with enhanced throughput, thereby promoting the progress of science, and advancing the national prosperity and welfare.…

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CAREER: Synergistic Co-Design of Hardware and Control Systems for Over-Actuated Motion Stages in High-Throughput Chip Ma | Dev Procure